Viatron TFT Process
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  • Viatron TFT Process
TFT Process
Pre-compaction
Buffer Layer Depo
a-si Layer Depo
De-hydrogenation
Crystallization
Gate Oxide Layer Depo
Gate Metal Depo
Ion Doping
Dopant Activation
Insulator Layer Depo
S/D Metal Depo
Passivation Layer Depo
Hydrogenation
Insulator Layer Depo
IGZO Depo
Active Heat-treatment
IGZO Patterning
ESL Layer Depo
ESL Heat-treatment
ESL Patterning
Glass
PI Coating
HVCD
PI Curing
Oxide TFT
Process
LTPS TFT
Process