[LTPS]
A-SPC Crystallization_FE-RTA (A-SPC结晶化) |
[LTPS]
Pre-compaction(预收缩) |
[LTPS]
Hydrogenation(氢化) |
[LTPS]
PolyimideSlit Die Coater (PI缝隙钢型涂布机) |
[LTPS]
SGS Crystallization_OE-RTA (SGS结晶化) |
[LTPS]
Dopant Activation(活化) |
[LTPS]
De-Hydrogenation(Low-temp.) (低温去氢) |
HVCD
(Flexible机板预硬化)
|
|
[LTPS]
De-Hydrogenation(high-temp.) (高温去氢) |
[Oxide]
IGZO Furnace(氧化物热处理) |
[LTPS]
Polyimide CuringFurnace (Flexible PICF) (PI硬化) |
[Solar]
TCO CoatingCIGS Selenization (透明电极镀膜CIGS硒化) |
[LTPS]
Dopant Activation(活化) |
R2R System
(Flexible机板涂布以及热处理)
|
