[LTPS]
A-SPC Crystallization_FE-RTA |
[LTPS]
Pre-compaction |
[LTPS]
Hydrogenation |
[LTPS]
PolyimideSlit Die Coater |
[LTPS]
SGS Crystallization_OE-RTA |
[LTPS]
Dopant Activation |
[LTPS]
De-Hydrogenation(Low-temp.) |
HVCD
|
|
[LTPS]
De-Hydrogenation(high-temp.) |
[Oxide]
IGZO Furnace |
[LTPS]
Polyimide CuringFurnace (Flexible PICF) |
[Solar]
TCO CoatingCIGS Selenization |
[LTPS]
Dopant Activation |
R2R System
|
