The inline-type equipment allows glass to be processed at high speed one by one in a high-temperature range (0-800°C) while the glass moves horizontally through each chamber.
Core Technologies
- High temperature heat treatment(＜800℃)
- Excellent temperature uniformity(within ± 3℃)
- Large area available(2-8G generation glass)
- Warpage minimization
- Hot wall type : Minimize heat loss
- Low power consumption
Process
-
It processes pre-compaction, dehydrogenation, activation, and hydrogenation.
SPEC
-
Temperature uniformity- within ± 3℃
Applications
LCD TFT
OLED TFT